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智能压力钱汇娱乐分几类?是不是通用的?

作者: 来源: 日期:2018-9-26 10:02:24 人气:164

目前智能压力钱汇娱乐分为压阻式和电容式两大类。压阻式压力钱汇娱乐根据工艺技术不同分为:金属应变式;玻璃微熔式;扩散硅;陶瓷压阻;溅射薄膜式。

陶瓷电容式根据工艺要求和量程不同在电极的形状和电极表面的处理上略有不同。根据应用可大致分三类:

1、32mm直径大膜片。(应用于工业现场的监控)

2、21mm直径小膜片。(应用于发动机机油压力检测)

3、16X16mm方形膜片。(应用于汽车空调压力检测)

首先是压阻式压力钱汇娱乐

1:金属应变片式

金属应变技术是历史最为悠久的钱汇娱乐技术。在各种压力钱汇娱乐应用中也是最早的。技术成熟,广泛被中小企业所采用。主要应用于中高压力(20Bar-1000Bar)和超高压(1000Bar以上)的测量。

在称重钱汇娱乐上应用金属应变计很多,应变计具有温漂小的优点。同时灵敏度小(一般2mV/V)和桥路阻值小,使其应用于压力变送器尤其是4-20mA输出的二线制变送器在电路设计上往往比较困难,对电路的要求比较高。随着数字电路技术的发展这个问题已经基本得到妥善解决。各大数字压力变送IC厂商都已提供了较好的解决方案电路。另外要提到的是国内很多企业对应变计贴片工艺研究不够深入,工艺上存在不足,造成应变钱汇娱乐零点漂移,长期稳定性不好以及抗过载能力不足。但是目前发展到现在,国内及进口的金属应变式钱汇娱乐基本没有差别,在工艺和功能上都得到良好的解决。

2:玻璃微熔式

玻璃微熔技术由美国MSI公司于上个世纪90年代早期研发成功并开始批量生产。90年代中晚期被美国TI公司应用于汽车工业。主要用于汽车EBD系统。近几年开始应用于缸内直喷技术的发动机上。测量压力范围7Bar-700Bar。 有良好的可批量生产性,硅应变计的生产技术现为国外公司所掌握。国内目前有公司已在研发和小批量生产,产品的可靠性有待确认。也有少数公司开始生产微熔压力钱汇娱乐。

半导体硅片的温度特性比较差,通常大于10%FS/100度,必须进行温度补偿,补偿方式通常有模拟补偿和数字补偿两种方式。

3:扩散硅式

扩散硅技术是随着上个世纪后期半导体微机电技术和其它材料及辅助生产技术的日益成熟渐渐发展起来的一种钱汇娱乐技术。同样有良好的可批量生产性,但制造成本相对较高,设备投入相对较大,工艺流程相对较长。测量压力范围10Kpa -700Bar.国内主要制造商宝鸡麦克、恒通、南京高华等。目前较少应用于汽车行业,多用于工业领域。但近年美国精量电子已开发出应用与汽车领域的低成本扩散硅充油压力变送器。

4:陶瓷压阻式

陶瓷压阻技术也成熟与上个世纪末期,陶瓷本身的刚性决定了它非常合适做钱汇娱乐膜片材料,加之镣系电阻材料延展特性与之配合是一种理想的钱汇娱乐技术选着。目前国内外有众多的公司生产。但在陶瓷材料烧结和镣系电阻材料以及其他辅助材料和工艺上国内公司和国外公司还是有很大的差距的。压力测量范围1Bar-700Bar,但不合适测量冲击性高压。

同样有批量生产性,通用公司有应用于汽车机油压力测量领域。在50Bar以内压力测量较为广泛。成本相对较低。

5:溅射薄膜式

溅射薄膜技术是上个世纪末随着溅射技术的成熟而发展起来的新型技术。可以理解为应变计技术借助新技术的发展。测量压力范围5Bar-1000Bar。

 

6:陶瓷电容式

陶瓷电容技术是利用平行板电容的电容值与板间距的的倒数成线性原理生产的一种电容钱汇娱乐,电容钱汇娱乐的校准是利用电容的充放电时间的不同结合数字电路进行的。该技术目前只有少数外国公司能够进行批量化生产。广泛用于工业领域和汽车领域。

陶瓷电容生产技术的核心在于电极厚度1微米和电极间距20微米。陶瓷电容的过载能力优于其他钱汇娱乐其技术。但是放大必须用数字电路。

At present, smart pressure sensors are divided into two categories: piezoresistive and capacitive. Piezoresistive pressure sensors are divided into: metal strain type; glass micro-melting type; diffusion silicon; ceramic piezoresistive; sputtering film type.


Ceramic capacitive type is slightly different in electrode shape and electrode surface treatment according to process requirements and measurement range. It can be broadly classified into three categories according to application.


1, 32mm large diameter diaphragm. (used in industrial field monitoring)


2, 21mm small diameter diaphragm. (applied to engine oil pressure test)


3, 16X16mm square diaphragm. (used in automobile air conditioning pressure test)


The first is piezoresistive pressure sensor.


1: metal strain gauge.

Metal strain technology is the oldest sensor technology. It is also the earliest application in all kinds of pressure sensors. Mature technology has been widely adopted by small and medium-sized enterprises. It is mainly applied to the measurement of medium high pressure (20 Ba 1000 1000) and ultra high pressure (above 1000Bar).

There are many metal strain gauges on weighing sensors, and the strain gauge has the advantage of small temperature drift. At the same time, the sensitivity is small (generally 2mV / V) and the bridge resistance is small, so it is difficult to apply it to the pressure transmitter, especially the 2-wire transmitter with 4-20mA output, in the circuit design, and the circuit requirements are higher. With the development of digital circuit technology, this problem has been basically solved. The major digital pressure transfer to IC manufacturers has provided a better solution circuit. In addition, many domestic enterprises have not done enough in-depth research on the strain gauge mounting process, and there are insufficient technology, resulting in zero drift of strain sensor, poor long-term stability and insufficient overload resistance. But at present, there is no difference between domestic and imported metal strain sensor, and it has been solved well in technology and function.

2: glass micro melting

Glass micro-melting technology was successfully developed by MSI in the early 1990s and began mass production. In the late 90s, it was used by the TI company in the automotive industry. It is mainly used in automobile EBD system. In recent years, it has been applied to the engine of direct injection technology. Measure pressure range 7Bar-700Bar. The production technology of silicon strain gauge is well controlled by foreign companies. At present, domestic companies have been developing and producing small quantities, and the reliability of products needs to be confirmed. A few companies are beginning to produce micro melt pressure sensors.

Semiconductor silicon wafer temperature characteristics are poor, usually greater than 10% FS / 100 degrees, must be compensated for temperature, compensation methods are usually analog compensation and digital compensation.

3: diffused silicon type

Diffused silicon technology is a kind of sensor technology developed gradually with the maturity of semiconductor micro-electromechanical technology, other materials and auxiliary production technology in the late last century. There is also good batch production, but the manufacturing cost is relatively high, equipment investment is relatively large, the process is relatively long. Measuring pressure range 10Kpa -700Bar. main domestic manufacturers Mike Baoji, Hengtong, Nanjing Gao Hua and so on. At present, it is seldom applied to the automotive industry, and is widely used in the industrial field. But in recent years, American precision electronics have developed low-cost diffused silicon oil-filled pressure transmitters for applications and automotive applications.

4: Ceramic piezoresistive

Ceramic piezoresistive technology is also mature with the end of the last century, the rigidity of ceramics itself determines that it is very suitable for sensor diaphragm materials, plus the ductility of praseodymium-based resistance materials with it is an ideal choice of sensor technology. At present, there are many companies at home and abroad. However, there is still a big gap between domestic and foreign companies in sintering ceramics, praseodymium resistance materials and other auxiliary materials and processes. The pressure range is 1Bar-700Bar, but it is not suitable to measure the impact pressure.

Also with mass production, General Company has been applied to the field of automotive oil pressure measurement. Pressure measurement is more extensive within 50Bar. The cost is relatively low.

5: sputtered film type

Sputtered film technology is a new technology developed at the end of last century with the development of sputtering technology. It can be understood that strain gauge technology relies on the development of new technology. Measure pressure range 5Bar-1000Bar.

6: ceramic capacitor type

Ceramic capacitance technology is a kind of capacitance sensor based on the principle that the reciprocal of the capacitance value of parallel plate capacitance and the distance between plates is linear. The calibration of capacitance sensor is carried out by combining the different charging and discharging time of capacitance with digital circuit. At present, only a few foreign companies can make mass production. Widely used in industrial and automotive fields.

The core of ceramic capacitor production technology is the electrode thickness of 1 microns and the electrode spacing of 20 microns. The overload capability of ceramic capacitors is superior to that of other sensors. But amplification must be done with digital circuits.

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